| Laser grooving is the result of the development of large integrated circuit. Because the more delicate of the line is, the more capacity of the slice of silicon. Many conpoents are deposited on a large slice of silicon or other semiconductor materials. Then the slice is cut into many cells in order to increase productivity and reduce production cost. The grooving machine process can be finished by laser. The laser grooving machine has many advantages being compared with many traditional methods. Please refer to following tables.
Contrast between ND: YAG Laser grooving and traditional methods.
| Method |
Grooving |
GD |
GS |
PP |
MP |
| Etching |
Narrower |
Shallow |
Slow |
Low |
High |
| Grinder |
Wide |
Deep |
Middle |
Low |
High |
| High rotating disc |
Wide |
Deep |
Middle |
Low |
High |
| Diamond |
Wide |
Deep |
Middle |
Low |
High |
| Supersonic |
Wide |
Middle |
Middle |
Low |
High |
| Nd:YAG Laser |
Narrowest |
Shallow |
Fast |
High |
Lowest |
|